Heraeus Thin Film Materials - Sputtering Target Portfolio
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Silver Sputtering Targets
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Material
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Purities
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Market
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Ag
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Silver
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3N7, 4N, 5N
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Electronics & Semiconductor
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Ag
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Silver
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3N7
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Glass Coating
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Ag
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Silver
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3N7
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Photovoltaics
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Ag-alloys
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Silver alloys
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*
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Glass coating
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other Ag
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Silver / Silver alloys
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*
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others
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Aluminium Sputtering Targets
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Material
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Purities
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Market
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Al
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Aluminium
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5N, 5N5
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Electronics & Semiconductor
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Al
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Aluminium
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4N, 5N
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Displays
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Al
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Aluminium
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3N, 4N
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Glass Coating
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Al
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Aluminium
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4N
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Photovoltaics
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AlSiCu
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Alumnium Silicon Copper
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5N, 5N5
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Electronics & Semiconductor
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other Al
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Aluminium / Aluminium alloys
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*
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others
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Gold Sputtering Targets
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Material
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Purities
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Market
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Au
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Gold
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4N, 5N
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Electronics & Semiconductor
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Au
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Gold
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4N
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Displays
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Au
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Gold
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4N
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Glass Coating
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AuAs
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Gold Arsenic
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4N, 5N
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Electronics & Semiconductor
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AuGe
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Gold Germanium
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4N, 5N
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Electronics & Semiconductor
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AuPt
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Gold Platinum
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4N
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Electronics & Semiconductor
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AuSb
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Gold Antimon
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4N, 5N
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Electronics & Semiconductor
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AuSn
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Gold Tin
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4N, 5N
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Electronics & Semiconductor
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AuZn
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Gold Zinc
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4N
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Electronics & Semiconductor
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other Au
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Gold / Gold alloys
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*
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others
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Bismuth Sputtering Targets
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Material
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Purities
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Market
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Bi
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Bismuth
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4N
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Glass Coating
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other Bi
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Bismuth / Bismuth alloys
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*
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others
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Cobalt Sputtering Targets
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Material
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Purities
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Market
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CoPt
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Cobalt Platinum
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*
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Magnetic Data Storage
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CoFe
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Cobalt Iron
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*
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Magnetic Data Storage
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CoCrPtO
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Cobalt Chromium
Platinum Oxide
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*
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Magnetic Data Storage
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CoCrPtB
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Cobalt Chromium
Platinum Boron
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*
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Magnetic Data Storage
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other CoCrPtB
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Cobalt Chromium
Platinum Boron alloys
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*
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Magnetic Data Storage
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other Co
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Cobalt / Cobalt alloys
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*
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others
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Chromium Sputtering Targets
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Material
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Purities
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Market
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Cr
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Chromium
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3N5
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Electronics & Semiconductor
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Cr
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Chromium
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3N7
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Displays
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Cr
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Chromium
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2N5 - 4N
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Glass Coating
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Cr
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Chromium
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*
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Magnetic Data Storage
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CrNiAl
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Chromium Nickel Aluminium
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3N, 3N5
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Electronics & Semiconductor
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CrSi
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Chromium Silicon
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3N
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Electronics & Semiconductor
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CrTi
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Chromium Titanium
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*
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Magnetic Data Storage
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other Cr
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Chromium / Chromium alloys
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*
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others
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Copper Sputtering Targets
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Material
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Purities
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Market
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Cu
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Copper
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4N5, 5N
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Electronics & Semiconductor
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Cu
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Copper
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4N, 4N7
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Displays
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Cu
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Copper
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*
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Glass Coating
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CuAl
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Copper Aluminium
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*
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Glass Coating
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CuCr
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Copper Chromium
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3N5
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Electronics & Semiconductor
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CuGa
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Copper Gallium
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4N
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Photovoltaics
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CuIn
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Copper Indium
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4N
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Photovoltaics
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CuNi
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Copper Nickel
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3N5
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Electronics & Semiconductor
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CIG
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Copper Indium Gallium
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4N
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Photovoltaics
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other Cu
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Copper / Copper alloys
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*
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others
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Hafnium Sputtering Targets
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Material
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Purities
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Market
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Hf
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Hafnium
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3N (excl. Zr)
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Electronics & Semiconductor
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other Hf
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Hafnium / Hafnium alloys
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*
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others
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Indium Sputtering Targets
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Material
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Purities
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Market
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In
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Indium
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4N, 5N
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Glass Coating
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In
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Indium
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4N, 5N
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Photovoltaics
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InSn
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Indium Tin
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3N
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Glass Coating
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ITO
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Indium Tin Oxide
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3N, 4N
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Glass Coating
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ITO
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Indium Tin Oxide
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4N
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Photovoltaics
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other In
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Indium / Indium alloys
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*
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others
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Iridium Sputtering Targets
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Material
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Purities
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Market
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Ir
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Iridium
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3N
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Electronics & Semiconductor
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other Ir
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Iridium / Iridium alloys
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*
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others
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Molybdenum Sputtering Targets
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Material
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Purities
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Market
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Mo
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Molybdenum
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3N5
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Electronics & Semiconductor
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Mo
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Molybdenum
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3N5
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Displays
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Mo
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Molybdenum
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3N5
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Glass Coating
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Mo
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Molybdenum
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3N5
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Photovoltaics
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other Mo
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Molybdenum /
Molybdenum alloys
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*
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others
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Niobium Sputtering Targets
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Material
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Purities
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Market
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Nb
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Niobium
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3N
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Displays
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Nb
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Niobium
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2N7
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Glass Coating
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NbO
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Niobium Oxide
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3N5, 4N
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Displays
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other Nb
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Niobium / Niobium alloys
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*
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others
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Nickel Sputtering Targets
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Material
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Purities
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Market
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Ni
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Nickel
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3N5
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Electronics & Semiconductor
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Ni-alloys
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Nickel alloys
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*
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Magnetic Data Storage
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NiAl
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Nickel Aluminium
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3N5, 3N8
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Electronics & Semiconductor
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NiCr
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Nickel Chromium
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3N5
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Electronics & Semiconductor
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NiCr
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Nickel Chromium
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2N8
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Glass Coating
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NiPt
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Nickel Platinum
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3N
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Electronics & Semiconductor
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NiV
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Nickel Vanadium
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3N5
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Electronics & Semiconductor
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NiV
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Nickel Vanadium
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2N8
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Glass Coating
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NiV
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Nickel Vanadium
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3N
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Photovoltaics
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NiW
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Nickel Tungsten
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*
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Magnetic Data Storage
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Ni
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Nickel / Nickel alloys
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*
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others
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Osmium Sputtering Targets
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Material
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Purities
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Market
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OsRu
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Osmium Ruthenium
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3N5
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Electronics & Semiconductor
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other Os
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Osmium / Osmium alloys
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*
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others
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Palladium Sputtering Targets
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Material
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Purities
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Market
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Pd
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Palladium
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3N5, 4N
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Electronics & Semiconductor
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other Pd
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Palladium / Palladium alloys
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*
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others
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Platinum Sputtering Targets
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Material
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Purities
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Market
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Pt
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Platinum
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3N5, 4N
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Electronics & Semiconductor
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other Pt
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Platinum / Platinum alloys
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*
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others
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Ruthenium Sputtering Targets
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Material
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Purities
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Market
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Ru
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Ruthenium
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2N8, 3N, 3N8
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Electronics & Semiconductor
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Ru
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Ruthenium
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*
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Magnetic Data Storage
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other Ru
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Ruthenium / Ruthenium alloys
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*
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others
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Silicon Sputtering Targets
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Material
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Purities
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Market
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Si
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Silicon
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5N
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Electronics & Semiconductor
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Si
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Silicon
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5N
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Displays
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Si
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Silicon
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5N
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Glass Coating
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Si
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Silicon
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5N
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Photovoltaics
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SiAl
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Silicon Aluminium sprayed
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3N
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Glass Coating
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SISPA®
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Silicon Aluminium cast
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3N
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Glass Coating
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SISPA®
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Silicon Aluminium
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3N
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Photovoltaics
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other Si
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Silicon / Silicon alloys
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*
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others
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Tin Sputtering Targets
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Material
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Purities
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Market
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Sn
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Tin
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3N
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Glass Coating
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Sn
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Tin
|
3N, 4N
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Photovoltaics
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other Sn
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Tin / Tin alloys
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*
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others
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Fe / Stainless Steel Sputtering Targets
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Material
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Purities
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Market
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SST
|
Stainless Steel
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*
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Glass Coating
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FePt
|
Iron Platinum
|
*
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Magnetic Data Storage
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other Fe
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Iron / Iron alloys
|
*
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others
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Tantalum Sputtering Targets
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Material
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Purities
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Market
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Ta
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Tantalum
|
3N5
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Electronics & Semiconductor
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Ta
|
Tantalum
|
3N5
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Displays
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Ta
|
Tantalum
|
*
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Magnetic Data Storage
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TaAl
|
Tantalum Aluminium
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3N5
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Electronics & Semiconductor
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other Ta
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Tantalum / Tantalum alloys
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*
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others
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Titanium Sputtering Targets
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Material
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Purities
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Market
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Ti
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Titanium
|
3N, 4N, 4N5, 5N
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Electronics & Semiconductor
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Ti
|
Titanium
|
2N7, 3N, 4N5
|
Displays
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|
Ti
|
Titanium
|
2N4
|
Glass Coating
|
|
Ti
|
Titanium
|
*
|
Magnetic Data Storage
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|
TiO
|
Titanium Oxide
|
3N5, 3N
|
Displays
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|
TiOx
|
Titanium Oxide
|
2N6
|
Glass Coating
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other Ti
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Titanium / Titanium alloys
|
*
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others
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Tungsten Sputtering Targets
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Material
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Purities
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Market
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W
|
Tungsten
|
3N5
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Electronics & Semiconductor
|
|
W
|
Tungsten
|
3N
|
Glass Coating
|
|
WTi
|
Tungsten Titanium
|
4N5
|
Electronics & Semiconductor
|
|
other W
|
Tungsten / Tungsten alloys
|
*
|
others
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Zinc Sputtering Targets
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Material
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Purities
|
Market
|
|
ZAO®
|
Zinc Aluminium Oxide
|
3N
|
Glass Coating
|
|
ZAO®
|
Zinc Aluminium Oxide
|
3N
|
Photovoltaics
|
|
Zn cast
|
Zinc cast
|
4N
|
Glass Coating
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|
Zn sprayed
|
Zinc sprayed
|
3N
|
Glass Coating
|
|
ZnAl
|
Zinc Aluminium
|
3N
|
Photovoltaics
|
|
ZnAl cast
|
Zinc Aluminium cast
|
4N
|
Glass Coating
|
|
ZnAl sprayed
|
Zinc Aluminium sprayed
|
3N
|
Glass Coating
|
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Zn alloys
|
Zinc alloys
|
3N
|
Glass Coating
|
|
ZnAlO
|
Zinc Aluminium Oxide
|
3N
|
Displays
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|
i-ZnO
|
Intrinsic Zinc Oxide
|
3N5
|
Photovoltaics
|
|
ZnO 0.01
|
doped Zinc Oxide (100 ppm)
|
3N5
|
Photovoltaics
|
|
ZnO 0.06
|
doped Zinc Oxide (600 ppm)
|
3N5
|
Photovoltaics
|
|
ZnOMgO (ZMO)
|
Zinc Magnesium Oxide
|
3N
|
Photovoltaics
|
|
ZnSn
|
Zinc Tin
|
3N
|
Glass Coating
|
|
other Zn
|
Zinc / Zinc alloys
|
*
|
others
|
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Zirconium Sputtering Targets
|
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Material
|
|
Purities
|
Market
|
|
Zr
|
Zirconium
|
2N2 (excl. HF)
|
Glass Coating
|
|
other Zr
|
Zirconium / Zirconium alloys
|
*
|
others
|
