Sputtering Targets for Electronics & Semiconductor
Heraeus is a major supplier of sputtering targets and evaporation materials for the semiconductor and electronic industry. As a material specialist, we rely on our extensive know-how in metallurgy and production technologies.
With our product portfolio and specialties, we offer a broad range of target materials for various electronics applications.
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Applications
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IC-Interconnects
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Backside-Metallization
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Underbump-Metallization
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High-K
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MEMS
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Optoelectronics
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Our world-wide production facilities produce materials using either melting/casting or powder metallurgy processes. Our machining shops can produce different target and backing plate designs for all major OEM configurations.
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OEM configurations
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Applied Materials
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Oerlikon
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Anelva
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Singulus
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Aviza (Trikon)
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TEL-Eclipse
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Leybold
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Ulvac
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NEXX
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The Heraeus core competence in precious metals enables us to offer a full package of precious metal products, supported by professional precious metal management.
As a material management specialist we offer our customers the full service including:
- backing plate management
- PM-trading
- PM-financing
- Recycling
In addition to standard materials offerings, our experienced technical teams and R&D capabilities support your requirements in
joint development projects .
Standard Materials (other materials available on request)
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Material
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Name
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Composition [wt%]
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Purity
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Ag
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Silver
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100%
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3N7, 4N, 5N
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Al
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Aluminium
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100%
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5N, 5N5
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AlSiCu
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Aluminium Silicon Copper
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various
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5N, 5N5
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Au
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Gold
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100%
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4N, 5N
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AuAs
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Gold Arsenic
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AuAs0,4
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4N, 5N
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AuGe
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Gold Germanium
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AuGe12
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4N, 5N
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AuPt
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Gold Platinum
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various
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4N
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AuSb
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Gold Antimon
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AuSb0,5 (30)
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4N, 5N
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AuSn
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Gold Tin
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AuSn20 (25, 30)
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4N, 5N
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AuZn
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Gold Zinc
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AuZn2 (5)
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4N
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Cr
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Chromium
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100%
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3N5
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CrNiAl
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Chromium Nickel Aluminium
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various
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3N, 3N5
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CrSi
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Chromium Silicon
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CrSi50
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3N
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Cu
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Copper
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100%
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4N5, 5N
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CuCr
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Copper Chromium
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CuCr50
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3N5
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CuNi
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Copper Nickel
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various
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3N5
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Hf
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Hafnium
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100%
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3N (excl. Zr)
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Ir
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Iridium
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100%
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3N
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Mo
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Molybdenum
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100%
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3N5
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Ni
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Nickel
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100%
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3N5
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NiAl
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Nickel Aluminium
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various
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3N5, 3N8
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NiCr
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Nickel Chromium
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various
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3N5
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NiPt
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Nickel Platinum
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various
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3N
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NiV
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Nickel Vanadium
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NiV7
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3N5
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OsRu
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Osmium Ruthenium
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OsRu20
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3N5
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Pd
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Palladium
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100%
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3N5, 4N
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Pt
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Platinum
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100%
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3N5, 4N
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Ru
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Ruthenium
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100%
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2N8, 3N, 3N8
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Si
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Silicon
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100%
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5N
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Ta
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Tantalum
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100%
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3N5
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TaAl
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Tantalum Aluminium
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various
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3N5
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Ti
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Titanium
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100%
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3N, 4N, 4N5, 5N
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W
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Tungsten
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100%
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3N5
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WTi
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Tungsten Titanium
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WTi10
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4N5
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