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Sputtering Targets for Electronics & Semiconductor

Electronics / Semiconductor
Heraeus is a major supplier of sputtering targets and evaporation materials for the semiconductor and electronic industry. As a material specialist, we rely on our extensive know-how in metallurgy and production technologies.
With our product portfolio and specialties, we offer a broad range of target materials for various electronics applications.
Applications
IC-Interconnects
Backside-Metallization
Underbump-Metallization
High-K
MEMS
Optoelectronics
Our world-wide production facilities produce materials using either melting/casting or powder metallurgy processes. Our machining shops can produce different target and backing plate designs for all major OEM configurations.
OEM configurations
Applied Materials Oerlikon
Anelva Singulus
Aviza (Trikon) TEL-Eclipse
Leybold Ulvac
NEXX
The Heraeus core competence in precious metals enables us to offer a full package of precious metal products, supported by professional precious metal management.
As a material management specialist we offer our customers the full service including:
- backing plate management
- PM-trading
- PM-financing
- Recycling
In addition to standard materials offerings, our experienced technical teams and R&D capabilities support your requirements in joint development projects .
 Sputtering Targets for Electronics & Semiconductor
Standard Materials
(other materials available on request)
Material Name Composition [wt%] Purity
Ag Silver 100% 3N7, 4N, 5N
Al Aluminium 100% 5N, 5N5
AlSiCu Aluminium Silicon Copper various 5N, 5N5
Au Gold 100% 4N, 5N
AuAs Gold Arsenic AuAs0,4 4N, 5N
AuGe Gold Germanium AuGe12 4N, 5N
AuPt Gold Platinum various 4N
AuSb Gold Antimon AuSb0,5 (30) 4N, 5N
AuSn Gold Tin AuSn20 (25, 30) 4N, 5N
AuZn Gold Zinc AuZn2 (5) 4N
Cr Chromium 100% 3N5
CrNiAl Chromium Nickel Aluminium various 3N, 3N5
CrSi Chromium Silicon CrSi50 3N
Cu Copper 100% 4N5, 5N
CuCr Copper Chromium CuCr50 3N5
CuNi Copper Nickel various 3N5
Hf Hafnium 100% 3N (excl. Zr)
Ir Iridium 100% 3N
Mo Molybdenum 100% 3N5
Ni Nickel 100% 3N5
NiAl Nickel Aluminium various 3N5, 3N8
NiCr Nickel Chromium various 3N5
NiPt Nickel Platinum various 3N
NiV Nickel Vanadium NiV7 3N5
OsRu Osmium Ruthenium OsRu20 3N5
Pd Palladium 100% 3N5, 4N
Pt Platinum 100% 3N5, 4N
Ru Ruthenium 100% 2N8, 3N, 3N8
Si Silicon 100% 5N
Ta Tantalum 100% 3N5
TaAl Tantalum Aluminium various 3N5
Ti Titanium 100% 3N, 4N, 4N5, 5N
W Tungsten 100% 3N5
WTi Tungsten Titanium WTi10 4N5